On-Machine Tool Measurement for Cutting-Edge Profile of Micro Endmill using Laser Diffraction(Nano/micro measurement and intelligent instrument)

概要

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The Diffraction Gauge Method, a novel measuring technique based on far-field laser diffraction, has been proposed to measure cutting-edge profiles of micro cutting tools with repeatability of better than 100nm even though on-machine surroundings. In this article, the cutting-edge profile measurements of worn micro endmills (φ300μm) are carried out. Agreement of the tool cutting-edge profiles measured by our method with the image observed by SEM certifies the accuracy of the measurement technique. Furthermore, the automated measurement on the tools is demonstrated for a purpose of duplicating on-machine measurement. Then, wear growth on micro tools are also investigated. The measurement results suggest that the method is available to evaluate the micro tool cutting-edge profiles as an ultra precision on-machine measurement.
社団法人日本機械学会の論文
2005-10-18