超音波スプレー法による透明セラミック薄膜の合成(2004年学部等研究教育補助金採択者報告)

概要

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Zinc oxide (ZnO) and titanium oxide (TiO_2) transparent ceramic thin-films have been synthesized by an ultrasonic spraying process, This process includes in three steps as follows, (1) an ultrasonic nebulizer generates a finer aerosol of raw materials, (2) nano-sized particles obtained by thermal decomposition of aerosol, (3) particles deposited and grain growth on substrate, resulting ceramic thin-films were obtained. Optical transmissivity of ZnO and TiO_2 thin-films throughout VIS region (400-800nm) were around 75%. Optical band-gap (E_<Gopt>) of 3.2eV was calculated by absorption edge of absorption spectra at UV region (300-400nm). X-ray diffraction patterns indicate preferential orientation on c-axis at ZnO thin-film. Film thickness was about 800nm, determined by SEM observation of cross-section of thin-films. Film thickness increasing with increase raw materials concentration and deposition time. Electric conductivity of ZnO thin-film was about 6.55×10^<-2> Ω・cm, determined by DC-four probe method.
東海大学の論文
2006-03-31