Sealed-cone-typeリザーバを用いたリチウム液体金属イオン源の開発

概要

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A sealed-cone-type liquid metal ion source suitable for lithium has been designed. It consists of a conical metal reservoir, a ceramic cap atop the reservoir covering the ion material, a tungsten filament, and a tungsten-needle emitter. The sealed-cone-type LMIS has good efficiency in heating and minimizes the contamination of the ion source. The chemical reaction of Li_2CrO_4 with Si was used to produce the Li liquid metal ion because it does so more easily than the heating of the Li metal does. The use of the Li primary ion in the secondary ion mass spectrometry analysis increased the yield of negative ions, which is similar to the case of the Cs primary ion. The use of light lithium ions improves beam focusing, which in turn increases the sensitivity of elemental analysis and ion imaging of a microarea.
2004-01-25