クリーンルーム構成材料の有機化合物発生量と気中濃度の予測に関する検討

概要

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Recently organic gas is one of the most important factors to control the AMC (Airborne Molecular Contaminants) in a cleanroom. It is used to measure the gas emission flux in the small chamber test for selecting a cleanroom materials or estimating cleanroom air concentration. However for estimating air concentration after a long term, it is necessary to measure the gas emission flux for a longtime. And for estimating of concentration in cleanroom air, it is used to calculate by the gas emission flux. But there are a quite a few reports that examined the relationship between actual data and calculation. In this study, we examined the rate constant of double exponential model. It was found that the logarithm of the rate constant related to 1/T, so it is possible to estimate the rate constant at room temperature for a short time. And a tendency to decrease of concentration was in good accordance between actual data and calculation.
社団法人日本建築学会の論文
2001-02-28