シーラント脱ガス物質のコロナ放電式イオナイザによる粒子生成 : クリーンルーム環境におけるガス-粒子変換

概要

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The mechanisms of particle formation from corona-discharge ionizers used in cleanroom(CR)s are composed of the erosion of their electrodes and the gas-to-particle conversion. However, the sources of silicon(Si) which is one of the main components in the corona-generated particles are still unknown. We hypothesized that Si was supplied from low-molecular-weight cyclo-siloxane(LMCS) which outgassed from silicone sealants via the gas-to-particle conversion process. First, organic gas components trapped in the CR air were analyzed with GC and GC-MS instrument. It was confirmed that LMCS existed in the ppb-order in the CR air. Next, LMCS-exposure tests were performed in the chamber where the ionizers and the samplers for elemental analysis were installed. The tests showed that LMCS was converted into Si-compound particles during the ionizer operation. These facts concluded that LMCS is one of the sources of the Si-contained particles generated from the ionizers in the CR environments.
社団法人日本建築学会の論文
1994-02-28