無電極ランプのプラズマ特性に関する研究

概要

論文の詳細を見る
Almost fifteen years have passed since the electrode-less lamp was put on the market. Some kinds of the electrode-less lamps have been developed from some companies. The trends in the development are to get the higher lumen output and to operate this lamp at lower frequency. These two things are not conflicting, because for getting higher output it is necessary to increase the input power. As the result, the circuit efficiency should be increased. In this situation it is considered to be important to grasp how the plasma performance depends on the operating frequency, and the research for this purpose has already held by Prof.Watanabe[1]. However, the research regarding the electron temperature and so on for this purpose has not reported yet. The purpose of our research is to grasp the relationship of the characteristics of the electrode-less lamp's plasma, namely the induced coupling plasma, to the operating frequency. The results are as follows;(1) The starting situations depend on the operating frequency was checked.(2) The measurement system was built up to check the plasma characteristics of electrode-less lamp operated at 13.56MHz and at around 150kHz.(3) The relationship between electron temperature and operating frequency was checked.
津山工業高等専門学校の論文
2005-02-28