多相交流電源による大口径プラズマの生成とその応用

概要

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We produced Ar and N_2 gas plasma using 6 electrodes with a diameter of 40cm and a length of 80cm. The electrodes were connected to a multi-phase voltage source with a commercial electric power system (2kV, 12kVA, 60Hz). Cylindrical plasma with a diameter of 44cm and a length of 80 cm was produced in N_2 gas of 5 Pa and applied voltage of 600 V. Plasma density and temperature measured using a single probe were n = 8×10^8 cm^3 and T = 0.5〜0.6eV, respectively. The plasma density and temperature were constant with the cylindrical plasma.We also calculated a sheath thickness, in order to apply the produced plasma to plasma immersion ion implantation. The sheath thickness increased with input voltage of workpiece, but decreased with plasma density or temperature.
神戸市立工業高等専門学校の論文
2004-03-01