Compositional Dependence of Electrical Characteristics in SrBi_2Ta_<2-x>Nb_xO_9 Ferroelectric Capacitor Reduced by H_2 Annealing
スポンサーリンク
概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2000-04-15
著者
-
Furuya Akira
Silicon Systms Research Laboratories Nec Corporation
-
CUCHIARO Joseph
Symetrix Corporation
-
Furuya Akira
Silicon Systems Research Laboratories Nec Corporation
関連論文
- Compositional Dependence of Electrical Characteristics in SrBi_2Ta_Nb_xO_9 Ferroelectric Capacitor Reduced by H_2 Annealing
- Electrical Characteristics of SrBi_2Ta_2O_9 Capacitor after Aluminum Metallization