Electrical Characteristics of SrBi_2Ta_2O_9 Capacitor after Aluminum Metallization
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1998-07-15
著者
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Furuya Akira
Silicon Systms Research Laboratories Nec Corporation
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AMANUMA Kazushi
Silicon Systems Research Laboratories, NEC Corporation
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MAEJIMA Yukihiko
Silicon Systems Research Laboratories, NEC Corporation
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Amanuma Kazushi
Silicon Systems Research Laboratories Nec Corporation
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Furuya Akira
Silicon Systems Research Laboratories Nec Corporation
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Maejima Yukihiko
Silicon Systems Research Laboratories Nec Corporation
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- 0.25μm FeRAM with CMVP (Capacitor-on-Metal/Via-Stacked-Plug) Memory Cell
- Compositional Dependence of Electrical Characteristics in SrBi_2Ta_Nb_xO_9 Ferroelectric Capacitor Reduced by H_2 Annealing
- Electrical Characteristics of SrBi_2Ta_2O_9 Capacitor after Aluminum Metallization