Improvement of Uneven Color of TiN Films Deposited by Arc Discharge Ion Plating

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概要

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• The arc discharge ion plating technique has been widely applied for manufacturing decorative films such as TiN.This technique utilizes an electron beam gun for evaporation, an ionization electrode for arc discharge and a filament for the promotion of ionization. However, according to the position of the ionization electrode and filament, the films exhibit uneven coloring. New positions of the ionization electrode and the filament are devised. The color uniformity is improved using a filament which is place under the electron beam passageway/

• 社団法人応用物理学会の論文
• 2000-06-15

著者

• Suzuki Akira

  Nihon Seimitsu Co. Ltd.

関連論文

• Multiply Charged Ions by Constant Voltage Arc Ion Plating and Its Applications
• Improvement of Uneven Color of TiN Films Deposited by Arc Discharge Ion Plating
• Effect of Multiply Charged Ions on the Viekers Hardness of TiC Films

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