Origin of Infrared Photoluminescence of Nanocrystalline Si in SiO_2 Films
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概要
- 論文の詳細を見る
Si^+ implanted SiO_2 films subjected to high-temperature annealing exhibit a broad-band infrared luminescence. In order to reveal the origin of the infrared luminescence, we investigate the structure and the luminescence property of Si^+ implanted SiO_2 films by Fourier transform infrared spectroscopy (FTIR), X-ray photoelectron spectroscopy (XPS), and photoluminescence (PL) and cathodoluminescence (CL) measurements. The experimental results of FTIR and XPS measurements show that nanosized Si particles, which are responsible for the infrared luminescence, are formed in SiO_2 films by thermal annealing at 1100℃. It is found that there is no significant difference between PL and CL spectra with excitation energy, and that the infrared CL spectra do not change with temperature. These results support the idea that the infrared luminescence is related to the defect states at the interface between nanocrystalline Si and SiO_2 films.
- 社団法人応用物理学会の論文
- 2000-06-15
著者
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TAKAHASHI Shinichi
Department of Urology, Oita Medical University
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Takahashi Hiroshi
Department Of Cardiology Nihon University Surugadai Hospital
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Kuwano Hiroshi
Department Of Electrical Engineering Keio University
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Kuwano Hiroshi
Department Of Electrical Engineering Faculty Of Science And Technology Keio University
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Nishimura Toshio
Department Of Pathology Kansai Medical University
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Hashimoto Yusuke
Department Of Electrical Engineering Keio University
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Nishimura Toshio
Department Of Electrical Engineering Keio University
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Nishimura Toshio
Department Of Communication Engineering Osaka University
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Takahashi Hiroshi
Department Of Applied Aquabiology National Fisheries University
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Takahashi Hiroshi
Department Of Electrical Engineering Keio University
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Nishimura Toshio
Department Of Biosciences School Of Science And Engineering Teikyo University
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Takahashi Shinichi
Department of Physics,Faculty of Science,Tohoku University:Asahi Glass Co.,Ltd.
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TAKAHASHI Shinichi
Department of Electrical Engineering, Keio University
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