Damage Due to Nitrogen Molecular Ions of GaN Heteroepitaxial Layers Grown on Si(001)Substrates by Molecular Beam Epitaxy Assisted by EIectron Cyclotron Resonance
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2000-05-15
著者
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Ando Hironori
Electric Engineering Osaka Institute Of Technology
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YODO Tokuo
Electronic Engineering, Osaka Institute of Technology
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Yodo Tokuo
Electric Engineering Osaka Institute Of Technology
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Harada Yoshinobu
Applied Physics Osaka Institute Of Technology
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TSUCHIYA Hironori
Electric Engineering, Osaka Institute of Technology
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Tsuchiya Hironori
Electric Engineering Osaka Institute Of Technology
関連論文
- Anisotropic Strain Estimated from Lattice Parameters Measured by Bond Method Using X-Ray Diffraction, in Molecular Beam Epitaxy-grown GaAs/Si(001)
- Damage Due to Nitrogen Molecular Ions of GaN Heteroepitaxial Layers Grown on Si(001)Substrates by Molecular Beam Epitaxy Assisted by EIectron Cyclotron Resonance