Analysis of Cracking and Delamination of Sputtered Thin Film during Wear Process

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概要

• 論文の詳細を見る
• 一般社団法人日本機械学会の論文
• 2004-03-06

著者

• Nakasa Keijiro

  Major Of Mech. Sys. Eng. Hiroshima Univ.

• Setyanto Taufiq

  Graduate Student Hiroshima Univ.

• Kato M

  Hitachi Ltd. Ibaraki Jpn

• KATO Masahiko

  Major of Mechanical System Engineering, Hiroshima University

• Kato Masahiko

  Major Of Mech. Sys. Eng. Hiroshima Univ.

• Jinhua Zheng

  Graduate Student Hiroshima Univ.

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• 407 ANALYSIS OF CRACKING AND DELAMINATION OF SPUTTERED THIN FILM DURING WEAR TEST
• Analysis of Cracking and Delamination of Sputtered Thin Film during Wear Process
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