Measurement of Delamination Energy of Sputtered SiC Film Coated on Tool Steel Substrate with Conical Precipitates by Micro Edge-indent Method
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概要
- 論文の詳細を見る
- 2010-08-01
著者
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Sugeta Atsushi
Major Of Mechanical System Engineering Hiroshima University
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KATO Masahiko
Major of Mechanical System Engineering, Hiroshima University
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FUJIOKA Koumei
Hiroshima University
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AKEBONO Hiroyuki
Major of Mechanical System Engineering, Hiroshima University
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Kato Masahiko
Major Of Mechanical System Engineering Hiroshima University
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Kato Masahiko
Major Of Mech. Sys. Eng. Hiroshima Univ.
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Akebono Hiroyuki
Major Of Mechanical System Engineering Hiroshima University
関連論文
- Measurement of Delamination Energy of Sputtered SiC Film Coated on Tool Steel Substrate with Conical Precipitates by Micro Edge-indent Method
- Analysis of Cracking and Delamination of Sputtered Thin Film during Wear Process