523 ナノスケール微細加工における加工力の特性(OS7 ナノ・マイクロ加工)

概要

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Nanoscale machining on Si (100) and fused quartz surfaces by a diamond tip has been performed using an atomic force microscope combined with a two-axis capacitive force/displacement transducer. A normal force F_n and a lateral force F_l under processing have been measured and evaluated. From evaluation of generated nanoscale grooves, a nanoscale scratching process is divided into an elastic deformation stage, an elastic/plastic deformation stage and a removal stage with increasing normal force, In the elastic/plastic deformation stage, a ratio offeree components F_l/F_n increases rapidly with an increase of normal force. In the removal stage, a rate of increase in F_l/F_n to normal force becomes gentle and the F_l/F_n becomes a constant value with an increase of normal force, which is about 0.4 on Si. That is, a transition of the elastic/plastic deformation stage and the removal stage is identified from a variation of the ratio offeree components.
一般社団法人日本機械学会の論文
2004-11-19