Molybdenum Carbide Prepared by Chemical Vapor Deposition
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概要
- 論文の詳細を見る
Molybdenum carbide was synthesized on a quartz plate using a hot-wall chemical vapor deposition reactor, in a stream of MoCl_5, benzene, hydrogen and argon at temperatures from 1000 to 1050 K and a total pressure of 230 Pa. The molybdenum carbides were analyzed by X-ray diffraction and X-ray photoelectron spectroscopy. β-Mo_2C was formed predominantly on the quartz plate at 1000 K and the molybdenum metal (110) phase was observed along with β-Mo_2C at 1050 K. The thickness of molybdenum carbides increased in the temperature range from 1000 to 1050 K but the atomic ratio, C ls(carbidic carbon) to Mo 3d of molybdenum carbides, gradually decreased.
- 社団法人応用物理学会の論文
- 2000-07-30
著者
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NAGAI Masatoshi
Graduate School of Bio-Applications and Systems Engineering, Tpkyo University of Agriculture and Tec
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OMI Shinzo
Graduate School of Bio-Applications and Systems Engineering, Tpkyo University of Agriculture and Tec
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Omi Shinzo
Graduate School Of Bio-applications And Systems Engineering Tokyo University Of Agriculture And Tech
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Nagai Masatoshi
Graduate School Of Bio-applications And Systems Engineering Tokyo Univ. Of Agriculture And Technol.
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SHISHIKURA Isao
Graduate School of Bio-Applications and Systems Engineering, Tokyo University of Agriculture and Tec
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Shishikura I
Graduate School Of Bio-applications And Systems Engineering Tokyo University Of Agriculture And Tech
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Shishikura Isao
Graduate School Of Bio-applications And Systems Engineering Tokyo University Of Agriculture And Tech
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Nagai Masatoshi
Graduate School Of Bio-applications And Systems Engineering Tokyo University Of Agriculture And Tech
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Omi Shinzo
Graduate School Of Bio-applications And Systems Engineering Tokyo University Of Agriculture And Tech
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