Optimization of Dipole Off-Axis Illumination by 1st-Order Efficiency Method for Sub-120nm Node with KrF Lithography
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2000-12-30
著者
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Baik Ki-ho
Memory R&d Division Hyundai Electronics Industries Co. Ltd.
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Baik Ki-ho
Memory R & D Division Hyundai Electronics Industries Co. Ltd.
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Ham Young-mog
Memory R & D Division Hyundai Electronics Industries Co. Ltd.
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KIM Seo-Min
Memory R & D Division, Hyundai Electronics Industries Co., Ltd.
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KIM Sang-Jin
Memory R & D Division, Hyundai Electronics Industries Co., Ltd.
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BANG Chang-Jin
Memory R & D Division, Hyundai Electronics Industries Co., Ltd.
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Kim Seo-min
Memory R & D Division Hyundai Electronics Industries Co. Ltd.
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Bang Chang-jin
Memory R & D Division Hyundai Electronics Industries Co. Ltd.
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- Optimization of Dipole Off-Axis Illumination by 1st-Order Efficiency Method for Sub-120nm Node with KrF Lithography
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- Analysis of Horizontal-Vertical Patterning Asymmetry in a Linearly Polarized Deep UV Exposure System
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