An Analogue Simulator Applied to Non-Stationary Vacuum Systems
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概要
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This paper describes the development of a nonlinear resistance unit simulating viscous flow conductance which uses a dual-cell optocoupler. The resistance of this VFS (viscous flow simulation) unit varies from 3 kΩ to 30 MΩ and is inversely proportional to the mean voltage applied to the unit. By connecting a VFS unit and an ordinary fixed resistor in parallel, the conductance of a long circular pipe was simulated in a wide range from molecular flow to viscous flow. The response time of the unit was 2 ms for turn-on and 17 ms for turn-off. A multistage vacuum system was simulated with several VFS units and the results are compared with the numerically-calculated values.
- 社団法人応用物理学会の論文
- 1981-01-05
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- An Analogue Simulator Applied to Non-Stationary Vacuum Systems