Threading Dislocation Density Reduction in GaAs on Si Substrates : Surfaces, Interfaces and Films
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1988-12-20
著者
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ITOH Yoshio
NTT Opto-electronics Laboratories
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Nishioka Takashi
Ntt Basic Research Laboratories
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SUGO Mitsuru
NTT Opto-electronics Laboratories
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YAMAMOTO Akio
NTT Opto-electronics Laboratories
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YAMAGUCHI Masfumi
NTT Opto-electronics Laboratories
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- Threading Dislocation Density Reduction in GaAs on Si Substrates : Surfaces, Interfaces and Films
- Oxidation of Ultrathin SiGe Layer on Si(001) : Evidence for Inward Movement of Ge
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