Characterization of Amorphous Si : H Films Prepared by rf Planar Magnetron Sputtering : III-1: AMORPHOUS FILMS
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1982-12-20
著者
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Usui Masaaki
Department Of Neurosurgery Toranomon Hospital
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NAGATOMO Takao
Department of Electronics Engineering, Faculty of Engineering, Shibaura Institute of Technology
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OMOTO Osamu
Department of Electronics Engineering, Faculty of Engineering, Shibaura Institute of Technology
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MORIBE Shunji
Department of Electronics, Shibaura Institute of Technology
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Moribe Shunji
Department Of Electronics Shibaura Institute Of Technology
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Usui Masaaki
Department Of Electronics Shibaura Institute Of Technology
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