Application of Large-Scale Binary Optical Elements to High-Resolution Projection Optics Used for Microlithography
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1999-12-30
著者
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Ohta Masakatsu
Nanotechnology Research Center Canon Inc.
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Unno Yasuyuki
Nanotechnology Research Center Canon Inc.
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SEKINE Yoshiyuki
Nanotechnology Research Center, Canon Inc.
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MURAKAMI Eiichi
Nanotechnology Research Center, Canon Inc.
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HIROSE Ryusho
Nanotechnology Research Center, Canon Inc.
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Sekine Yoshiyuki
Nanotechnology Research Center Canon Inc.
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Hirose R
Nanotechnology Research Center Canon Inc.
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Hirose Ryusho
Nanotechnology Research Center Canon Inc.
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Sekine Y
Nanotechnology Research Center Canon Inc.
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Murakami Eiichi
Nanotechnology Research Center Canon Inc.
関連論文
- Application of Large-Scale Binary Optical Elements to High-Resolution Projection Optics Used for Microlithography
- High-Precision Binary Optical Element Fabricated by Novel Self-Aligned Process