Simultaneous Measurements of Liquid Properties Using Multichannel Shear Horizontal Surface Acoustic Wave Microsensor
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概要
- 論文の詳細を見る
Surface acoustic waves (SAW) with a shear horizontal polarized displacement (SH-SAW) can be used to determine mechanical and electrical properties of an adjacent liquid. We propose a new multichannel SH-SAW microsensor for liquid characterization. The SH-SAW microsensor, which is fabricated on 36° rotated Y-cut X-propagating LiTaO_3, consists of three SAW delay lines. The propagating surfaces of two of the delay lines are metallized and electrically shorted, and the other one has a free surface which is an electrically active area. The viscosity, conductivity and permittivity of liquid are obtained simultaneously using the multichannel SH-SAW microsensor.
- 社団法人応用物理学会の論文
- 1996-05-30
著者
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Kondoh Jun
Faculty Of Engineering Shizuoka University
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Shiokawa Showko
Faculty Of Engineering Shizuoka University
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Saito Kazuki
Faculty Of Engineering Shizuoka University
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SUZUKI Hideyuki
Fuji Ultrasonic Eng. Co., Ltd.
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Suzuki Hideyuki
Fuji Ultrasonic Eng. Co. Ltd.
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