Simulation of a Pulse Time-Modulated Bulk Plasma in Cl_2

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1996-04-30

著者

• Ohtake Hiroto

  Nec Ulsi Device Development Laboratories

• Samukawa Seiji

  N Nec Ulsi Device Development Laboratories

• Yokozawa Ayumi

  NEC ULSI Development Laboratories

• Yokozawa A

  Nec Ulsi Device Dev. Lab. Kanagawa Jpn

関連論文

• Simulation of Variations in the Negative Ion Density in Time-Modulated Cl_2 Plasmas
• Simulation of a Pulse Time-Modulated Bulk Plasma in Cl_2
• First-Principles Investigation of Imperfect Structures in SiO_2 : Origins of Charge Traps Inducing Leakage Currents

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