First-Principles Investigation of Imperfect Structures in SiO_2 : Origins of Charge Traps Inducing Leakage Currents

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概要

• 論文の詳細を見る
• 1998-09-07

著者

• Yokozawa Ayumi

  NEC ULSI Development Laboratories

• Yokozawa Ayumi

  Nec Ulsi Device Development Laboratories

• MIYAMOTO Yoshiyuki

  NEC Fundamental Research Laboratories

関連論文

• Simulation of Variations in the Negative Ion Density in Time-Modulated Cl_2 Plasmas
• Simulation of a Pulse Time-Modulated Bulk Plasma in Cl_2
• First-Principles Investigation of Imperfect Structures in SiO_2 : Origins of Charge Traps Inducing Leakage Currents

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