Mechanisms of the Deposition of Hydrogenated Carbon Films

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1995-04-30

著者

• Moeller W

  Inst. Ion Beam Physics And Maetrials Res. Dresden Deu

• Moller Wolfhard

  Forschungszentrum Rossendorf

• Fukarek Wolfgang

  Forschungszentrum Rossendorf

• Lange Klaus

  Forschungszentrum Rossendorf

• Keudell Achim

  Max-Planck-Institut fur Plasmaphysik

• Jacob Wolfgang

  Max-Planck-Institut fur Plasmaphysik

関連論文

• Mechanisms of the Deposition of Hydrogenated Carbon Films
• Formation of Hard Amorphous Hydrogenated Carbon Films with Low Hydrogen Concentration and Their Erosion in Air

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