Nanofabrication of Multilayer Zone Plates by Helicon Plasma Sputtering

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1995-12-30

著者

• Koike Masaki

  Electrotechnical Laboratory

• SUZUKI Isao

  Electrotechnical Laboratory

関連論文

• Nanofabrication of Multilayer Zone Plates by Helicon Plasma Sputtering
• Absolute Intensity of Soft X-Rays of Synchrotron Radiation from the ETL-Storage Ring
• Ionic Fragmentation of CF_3Cl Photoexcited in the Cl L-Shell, C K-Shell, and F K-Shell Transition Regions
• Semi-quantitative Analysis of Fragmentation Processes of Ethylene Ion by Modified Extended Hückel Method
• PHOTON W-VALUE FOR Ar IN THE L-SHELL TRANSITION REGION
• FRAGMENT ION YIELDS FROM ACETONE PHOTOEXCITED IN THE C1s AND O1s TRANSITION REGIONS
• COINCIDENCE MEASUREMENT BETWEEN ENERGY-SELECTED ELECTRONS AND MULTI-CHARGED IONS USING A SPHERICAL MIRROR ANALYZER
• Double Auger Probabilities from Xe 4d_j,Kr3d_j,and Ar2p_j Hole States
• Appearance Potentials of Atomic and Molecular Hydrogen Ions from Small Hydrocarbons
• Ionization Efficiency Curves of C2D2 by Electron Impact
• Ionization Efficiency Curves of Acetylene by Electron Impact

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