Effects of Oxygen on CVD Diamond Synthesis
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概要
- 論文の詳細を見る
In order to investigate the influence of oxygen on the chemical vapor deposition (CVD) of diamond, gas mixtures of H_2-CH_4 and H_2-CH_4-O_2 were used to carry out thermal CVD. The effects of the oxygen additive were examined by gas chromatography for the exhaust gas and by a characterization of the deposits. With the addition of oxygen, the deposition of graphitic or amorphous carbon could be suppressed, so that the growth rate of diamond increased and the pressure range for the synthesis of diamond was extended. These effects resulted from the fact that the acetylene concentration in a deposition chamber is significantly reduced upon the addition of oxygen.
- 社団法人応用物理学会の論文
- 1987-09-20
著者
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Kondo Ken-ichi
Research And Development Center Stanley Electric Co . Ltd.
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KAWATO Takashi
Research Laboratory of Engineering Materials, Tokyo Institute of Technology
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Kawato T
Tohoku Univ. Sendai Jpn
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