Diamond Synthesis Suppressing the Thermal Decomposition of Methane in a Hot-Filament CVD
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概要
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Diamond films have been obtained by a new hot-filament CVD method in which CH_4 is dccomposed mainly by abstraction reaction with atomic hydrogens. The film obtained by this method was compared with that obtained by the method that involves the thermal decomposition of CH_4 near a filament. The quality of the former was better in crystallinity and amount of amorphous carbon but slightly lower in deposition rate than that by the latter method. It is suggested that the buoyancy flow induced near the hot filament affected the transport of reactant species even at 100 Torr.
- 社団法人応用物理学会の論文
- 1989-09-20
著者
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Kondo Ken-ichi
Research And Development Center Stanley Electric Co . Ltd.
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AIKYO Hiroyuki
Research Laboratory of Engineering Materials, Tokyo Institute of Technology
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Aikyo Hiroyuki
Research Laboratory Of Engineering Materials Tokyo Institute Of Technology
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