Graphical Representation of the Piezoresistance Coefficients in Silicon-Shear Coefficients in Plane

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概要

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• The shear piezoresistance coefficients π'_<66>, π'_<16> and π'_<26> of p- and n- type silicon are plotted as a function of the crystal directions for orientations in the (100) plane. Silicon pressure and other mechanical sensors with a four-terminal gauge, such as a Hall effect-type device, utilizing the shear stress have been of much interest. The outputs of the sensors are proportional to the shear piezoresistance coefficient π'_<66>.

• 社団法人応用物理学会の論文
• 1987-07-20

著者

• KANDA Yozo

  Hamamatsu University School of Medicine

関連論文

• Second-Order Piezoresistance Coefficients of p-Type Silicon
• Second-Order Piezoresistance Coefficients of n-Type Silicon
• Origin of the Linear and Nonlinear Piezoresistance Effects in p-Type Silicon
• Evaluation of the Piezoresistive Properties of Non-Single-Crystal Si Film
• Graphical Representation of the Piezoresistance Coefficients in Silicon-Shear Coefficients in Plane

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