Remarks on the Calculation of Energy Loss in Electron-Resist Films on Substrates

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1978-09-05

著者

• Nagami Koichi

  Electronics Department College Of Engineering University Of Osaka Prefecture

• Kotera Masatoshi

  Electronics Department College Of Engineering University Of Osaka Prefecture

• Murata Kenji

  Electronics Department College Of Engineering University Of Osaka Prefecture

関連論文

• Fundamental Studies of the Interproximity Effect in Electron-Beam Lithography
• A Three-Dimensional Study of the Absorbed Energy Density in Electron-Resist Films on Substrates
• A Simple Quantitative Electron Microprobe Analysis of Multielement Thin Films on Substrate
• Remarks on the Calculation of Energy Loss in Electron-Resist Films on Substrates

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