Low Energy Components of Ions Extracted from an RF Ion Source
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概要
- 論文の詳細を見る
Energy distributions of extracted ions from an RF ion source have been investigated using an electrostatic and a magnetic deflector under several discharge conditions. The experimental results suggest that the low energy components of ions, whose energies correspond to from fifty to ninety per cent of the extraction voltage, are mostly generated by electron collisions with neutral gas molecules in the cathode sheath region. The number of these low energy ions was decreased by suppressing the secondary electron emission from the canal sheath of the ion source. The resonance phenomena also appeared in both the axial and transverse magnetic fields. In the case of capacitive coupling with the transverse magnetic field, the effect of the resonance on low energy ions was very complicated.
- 社団法人応用物理学会の論文
- 1978-05-05
著者
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Ishikawa Itsuo
Department Of Electrical Engineering Faculty Of Engineering Yamanashi University
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Ishikawa Itsuo
Department Of Electric Engineering Faculty Of Engineering Yamanashi University
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Suganomata Shinji
Department Of Electric Engineering Faculty Of Engineering Yamanashi University
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IINO Toshiaki
Department of Electrical Engineering, Faculty of Engineering, Yamanashi University
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Iino Toshiaki
Department Of Electrical Engineering Faculty Of Engineering Yamanashi University:(present Address)fa
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