Micro Electro Mechanical Systems: From Research to Applications

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概要

• 論文の詳細を見る

• Micro electro mechanical systems (MEMS) are in the transition phase from research to industry. This paper intends to describe this process from the point of view of a European R&D institution. The MEMS market, its development and its most important products are discussed. In the second part, the R&D activities at HSG-IMIT in Germany are described. The last chapter deals with the cooperation between the R&D institution and industry, in particular with local German small-and medium-sized enterprises.

• 社団法人応用物理学会の論文
• 1998-12-30

著者

• Lang Walter

  Hahn Schickard Gesellschaft-institute Of Micromachining And Information Technology (hsg-imit)

• SANDMAIER Hermann

  Hahn Schickard Gesellschaft-Institute of Micromachining and Information Technology (HSG-IMIT)

関連論文

• (マイクロマシン : 基盤技術の充実と応用の展開の現状 第13回生研学術講演会)
• Micro Electro Mechanical Systems: From Research to Applications

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