<学術講演 セッション3> (<特集>マイクロマシン : 基盤技術の充実と応用の展開の現状 第13回生研学術講演会)

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概要

• 論文の詳細を見る

• Micro Electro Mechanical Systems (MEMS) are in the phase of transition from research to industry. This paper intends to describe this process from the point of view of a European R&D institution. The R&D activities at HSG-IMIT in Germany are described. The last chapter outlines the cooperation between the R&D institution and industry, in particular with local German small and medium sized enterprises.

• 東京大学の論文

著者

• Sandmaier H

  Hahn Schikard Gesellschaft-institute Ofmicromachining And Information Technology (hsg-imit) ; Izfm U

• Lang W

  Hahn Schikard Gesellschaft-institute Of Micromachining And Information Technology (hsg-imit)

• Lang Walter

  Hahn Schickard Gesellschaft-institute Of Micromachining And Information Technology (hsg-imit)

• SANDMAIER Hermann

  Hahn Schickard Gesellschaft-Institute of Micromachining and Information Technology (HSG-IMIT)

• Ducree Jens

  University of Freiburg-Institute for MicrosystemTechnolog (IMTEK) ; Hahn Schikard Gesellschaft-Insti

• Ducree Jens

  University Of Freiburg-institute For Microsystemtechnolog (imtek) ; Hahn Schikard Gesellschaft-insti

関連論文

• (マイクロマシン : 基盤技術の充実と応用の展開の現状 第13回生研学術講演会)
• Micro Electro Mechanical Systems: From Research to Applications

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