Stress Sensitivity Distribution Measurement Using a Low-Frequency Sound Wave and Its Application to Quartz Crystal Microbalances
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概要
- 論文の詳細を見る
A new method for measuring the stress sensitivity distribution on a resonator surface, including a region without electrodes, using a low-frequency sound wave is described, The experimental results for an AT-cut quartz crystal resonator obtained using the proposed method and the current pulsed-laser method are shown. Additionally, we applied this method to the design of quartz crystal microbalances using multiple resonance modes.
- 社団法人応用物理学会の論文
- 1997-05-30
著者
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Sekimoto Hitoshi
Faculty Of Agriculture Utsunomiya University
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Sekimoto Hitoshi
Tokyo Metropolitan University
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Goka Shigeyoshi
Tokyo Metropolitan University
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GOKA Shigeyoshi
Faculty of Engineering, Tokyo Metropolitan, University
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WATANABE Yasuaki
Faculty of Engineering, Tokyo Metropolitan, University
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Watanabe Yasuaki
Faculty Of Engineering Tokyo Metroploitan University
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Watanabe Yasuaki
Graduate School of Science and Engineering, Tokyo Metropolitan University
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