Lateral Solid-Phase Epitaxy of Vacuum-Deposited Amorphous Si Film over Recessed SiO_2 Patterns
スポンサーリンク
概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1985-05-20
著者
-
Tabe Michiharu
Atsugi Electrical Communication Laboratory Nippon Telegraph And Telephone Public Corporation
-
KUNII Yasuo
Atsugi Electrical Communication Laboratory, Nippon Telegraph and Telephone Public Corporation
-
Kunii Yasuo
Atsugi Electrical Communication Laboratory Nippon Telegraph And Telephone Public Corporation
関連論文
- Lateral Solid-Phase Epitaxy of Vacuum-Deposited Amorphous Si Film over Recessed SiO_2 Patterns
- UV Irradiation Effects on Chemical Vapor Deposition of SiO_2