UV Irradiation Effects on Chemical Vapor Deposition of SiO_2
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1985-03-20
著者
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Tabe Michiharu
Atsugi Electrical Communication Laboratory Nippon Telegraph And Telephone Public Corporation
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Tabe Michiharu
Atsugi Electrical Communication Laboratory Nippon Telegraph And Telphone Public Corporation
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TAKAHASHI Jun-ichi
Atsugi Electrical Communication Laboratory,Nippon Telegraph and Telphone Public Corporation
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Takahashi Jun-ichi
Atsugi Electrical Communication Laboratory Nippon Telegraph And Telphone Public Corporation
関連論文
- Lateral Solid-Phase Epitaxy of Vacuum-Deposited Amorphous Si Film over Recessed SiO_2 Patterns
- UV Irradiation Effects on Chemical Vapor Deposition of SiO_2