in situ Phosphorus-Doped Silicon Film Depositions by Magnetron Sputtering in Phosphorus Vapor
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1985-04-20
著者
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Okamoto Akio
Nippon Telegraph And Telephone Public Corp. Musashino Electrical Communication Laboratory
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SERIKAWA Tadashi
Nippon Telegraph and Telephone Public Corp., Musashino Electrical Communication Laboratory
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Serikawa Tadashi
Nippon Telegraph And Telephone Public Corp. Musashino Electrical Communication Laboratory
関連論文
- in situ Phosphorus-Doped Silicon Film Depositions by Magnetron Sputtering in Phosphorus Vapor
- Effect of Mixing Hydrogen-Argon on Magnetron Sputtered SiO_2 Films