Small Surface Damage Facet Coating on InGaAsP/InP Laser by ECR Plasma Deposition

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概要

• 論文の詳細を見る

• Electron cyclotron resonance (ECR) plasma deposition was applied to InGaAsP/InP buried heterostructure laser diode facet coating. The facet coated laser diodes had low leakage current diode characteristics and showed no degradation in lasing properties. Comparison with conventional deposition techniques such as plasma CVD and rf sputtering showed that ECR plasma deposition is quite suitable for the coating because very little crystal composition change and surface damage are induced during the coating process.

• 社団法人応用物理学会の論文
• 1984-08-20

著者

• Wakita Koichi

  Atsugi Electrical Communication Laboratory Nippon Telegraph And Telephone Public Corporation

• Matsuo Seitaro

  Atsugi Electrical Communication Laboratory Nippon Telegraph And Telephone Public Corporation

関連論文

• Small Surface Damage Facet Coating on InGaAsP/InP Laser by ECR Plasma Deposition
• Electron Cyclotron Resonance Plasma Deposition Technique Using Raw Material Supply by Sputtering

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