A New Optical Interferometer for Absolute Measurement of Linear Displacement in the Subnanometer Range

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概要

• 論文の詳細を見る

• A new optical interferometer system for the absolute determination of lattice constant of a crystal is designed and constructed. It can measure linear displacement accurately within the range of 94% of a period of the interference fringes with long term fluctuation of 50 pm for 14 hours and short term fluctuation of 30 pm. Its high visibility, compact and simple structure will allow various applications to precision measurement of dimension in both scientific and industrial fields.

• 社団法人応用物理学会の論文
• 1983-04-20

著者

• Nakayama Kan

  2nd Division National Research Laboratory Of Metrology

• Tanaka Mitsuru

  2nd Department National Research Laboratory Of Metrology

• Nakayama Kan

  2nd Department National Research Laboratory Of Metrology

関連論文

• Precision Goniometer for Fine Adjustment in the Nanoradian Range
• A New Optical Interferometer for Absolute Measurement of Linear Displacement in the Subnanometer Range
• Monolithic Goniometer for Pure Rotation and Fine Orientation Control
• The Dynamic Properties of a Monolithic Mechanism with Notch Flexure Hinges for Precision Control of Orientation and Position

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