Monolithic Goniometer for Pure Rotation and Fine Orientation Control

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1982-06-20

著者

• Nakayama Kan

  2nd Division National Research Laboratory Of Metrology

• Tanaka Mitsuru

  2nd Department National Research Laboratory Of Metrology

• Nakayama Kan

  2nd Department National Research Laboratory Of Metrology

関連論文

• Precision Goniometer for Fine Adjustment in the Nanoradian Range
• A New Optical Interferometer for Absolute Measurement of Linear Displacement in the Subnanometer Range
• Monolithic Goniometer for Pure Rotation and Fine Orientation Control
• The Dynamic Properties of a Monolithic Mechanism with Notch Flexure Hinges for Precision Control of Orientation and Position

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