MOCVD Growth and PL-Characteristics of Nd Doped GaAs (SOLID STATE DEVICES AND MATERIALS 1)
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Nd-doped GaAs epitaxial layers are grown by low-pressure metalorganic chemical vapour deposition. Nd doping as high as 10^<19> cm^<-3> is achieved at a source temperature of 100℃ using an organic rare-earth source, (CH_3C_5H_4)_3Nd. Nd concentrations in GaAs can be controlled by source temperature in the range from 10^<17> to 10^<19> cm^<-3>. Photoluminescence due to intra-4f-shell transitions in Nd^<3+> ions is observed around 0.9 eV, 1.1 eV, 1.4 eV. The spectra are nearly independent of Nd concentration and show maximum intensity at 8 × 10^<18> cm^<-3>. However, the spectra slightly depend on the growth temperature, reflecting the change in relative density of Nd^<3+> emitting centers with different surrounding atomic configurations.
- 社団法人応用物理学会の論文
- 1989-11-20
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