Magnetic Fe-C Films Prepared by Getter Sputtering on High Temperature Substrates

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概要

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• Magnetic Fe-C films were deposited by getter sputtering using alloy targets with nominal compositions of Fe_3C, Fe_<2.5>C and Fe_2C. Substrates used were quartz and their temperature was changed from 150° to 600℃. Magnetic properties of the films have been studied with analyses of film compositions and structures. With the increase of substrate temperature T_<sub>, the coercive force increases and then decreases through maximum values of 250〜310 Oe at T_<sub>=350°〜400℃. It has been shown that the high coercive force results mainly from Fe_3C crystallites less than 1000 Å in size.

• 社団法人応用物理学会の論文
• 1987-01-20

著者

• Munakata Makoto

  Research Institute For Scientific Measurements Tohoku University

• Goto Kimiyoshi

  Research Institute For Scientific Measurements Tohoku University

• WATANABE Katsuro

  Research Institute for Scientific Measurements, Tohoku University

• Watanabe Katsuro

  Research Institute For Scientific Measurements Tohoku University:(present Address)tdk Corporation

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• Magnetic Properties of Amorphous (Tb_Gd_x)_Fe_ Thin Films
• Influence of Substrate Temperature on Magnetic Properties and Domains of Amorphous Tb_Fe_ Films
• Magnetic Fe-C Films Prepared by Getter Sputtering on High Temperature Substrates
• Preparation and Magnetic Properties of Sm-Co Films with High Substrate Temperatures
• Studies on Magnetic Domains of Small Particles of Barium Ferrite by Colloid-SEM Method

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