Observation of Purifier Performance to Reduce Moisture in Hydrogen Chloride by Near Infrared Laser Absorption Spectrometry

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1997-12-15

著者

• Wu S-q

  Nippon Sanso Corp. Ibaraki Jpn

• WU Shang-Qian

  Tsukuba Laboratories, Nippon Sanso Corporation

• Wu Shang-qian

  Tsukuba Laboratories Nippon Sanso Corporation

• ISHIHARA Yoshio

  Tsukuba Laboratories, Nippon Sanso Co.

• Ishihara Yoshio

  Tsukuba Laboratories Nippon Sanso Co.

• Ishihara Yoshio

  Tsukuba Laboratories Nippon Sanso Corporation

• MORISHITA Jun-ichi

  Tsukuba Laboratories, Nippon Sanso Corporation

• KIMIJIMA Tetsuya

  Tsukuba Laboratories, Nippon Sanso Corporation

• Kimijima Tetsuya

  Tsukuba Laboratories Nippon Sanso Corporation

• Morishita Jun-ichi

  Tsukuba Laboratories Nippon Sanso Corporation

関連論文

• Reduction of Fringe Noise in Wavelength Modulation Spectroscopy Using a One-Dimensional Focal Plane Array
• Efficient Reduction of Fringe Noise in Trace Gas Detection with Diode laser Multipass Absorption Spectroscopy
• Absorption Spectrometry of Trace Moisture in Ammonia Gas with a 1371 nm Distributed-Feedback Diode Laser
• Proposal of Near-Infrared Laser Diode Spectroscopy at 1.74μm for HCl Monitor in Semiconductor Processes
• Growth of Ga_In_N_yAs_ Single Quantum Wells on InP(100)Substrate by Metalorganic Chemical Vapor Deposition
• Observation of Purifier Performance to Reduce Moisture in Hydrogen Chloride by Near Infrared Laser Absorption Spectrometry
• The Analysis of Trace Impurities in Nitrogen Gas by High Pressure Ionization Mass Spectrometry

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