Ion Energy Analysis through rf-Electrode
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概要
- 論文の詳細を見る
Energy measurements of ions which impinge on an rf-electrode in plasma were taken using two modes, a dc-mode and and an rf-mode. We calculated the ion energy distributions which were obtained using these modes and found that, for the dc-mode, the energy distribution broadened, and the center of the distribution varied, depending on the mass number of the ion. The distribution had extra peaks in addition to the normal saddle-shaped peaks. The features of the calculated distribution agreed well with the experimental results. The rf-mode was necessary to obtain the correct ion energy at the rf-electrode.
- 社団法人応用物理学会の論文
- 1997-11-01
著者
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Mizutani Naoki
Research And Development Division Ulvac Japan Ltd.
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Mizutani Naoki
Research & Development Division Ulvac Japan Ltd.
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Hayashi Toshio
Research & Development Division Ulvac Japan Ltd.
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HAYASHI Tsoshio
Research and Development Division, ULVAC JAPAN, Ltd.
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Hayashi Tsoshio
Research And Development Division Ulvac Japan Ltd.
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