Super-Wide Electron Cyclotron Resonance Plasma Source Excited by an Independent Double-Slot Antenna

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概要

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• In this paper we describe an improved super-wide electron cyclotron resonance (ECR) plasma source which consists of permanent magnets, a solenoid coil and an independently excited double-slot antenna. Each slot antenna is prepared in the side wall of the rectangular waveguide positioned so that the two slot antennas are parallel and shifted by the distance of λ_g/4 (λ_g: waveguide wavelength) from each other. An 800-mm-wide (onedimensional distributed) plasma of oxygen gas is produced, and an ion current density uniformity within ±5% over 770mm in length can be obtained.

• 社団法人応用物理学会の論文
• 1997-10-01

著者

• Yoshiki Hiroyuki

  Advanced Physics General Education Tsuruoka National College Of Technology

• Itadani Koji

  Daihen Corporation

• AMADATSU Shigeki

  DAIHEN Corporation

• SAIJO Tatsuya

  DAIHEN Corporation

関連論文

• Super-Wide Electron Cyclotron Resonance Plasma Source Excited by an Independent Double-Slot Antenna
• Equivalent Circuit Model of an Inductive RF Discharge with a Helical External Coil

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