Equivalent Circuit Model of an Inductive RF Discharge with a Helical External Coil

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概要

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• An inductive RF discharge with a helical external coil has been analyzed by an equivalent circuit model including both the inductive and capacitive coupling branches. A true inductive discharge is considered as a co-axial one-turn secondary winding of an air-core transformer, while a capacitive current is assumed to flow from a high voltage coil plate to a grounded electrode via a quartz glass and sheaths. The dependence of the plasma density on anternna coil voltage is calculated as a function of the excitation frequency and gas pressure. It is shown that the mechanism of the E-H mode jump, accompanied by the hysteresis phenomenon, can be attributed to the nonlinear dependence of the inductively absorbed power on the plasma density.

• 社団法人応用物理学会の論文
• 2000-02-15

著者

• Yoshiki H

  Tsuruoka National Coll. Technol. Yamagata Jpn

• Yoshiki Hiroyuki

  Advanced Physics General Education Tsuruoka National College Of Technology

関連論文

• Super-Wide Electron Cyclotron Resonance Plasma Source Excited by an Independent Double-Slot Antenna
• Equivalent Circuit Model of an Inductive RF Discharge with a Helical External Coil

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