Makyoh Topography : Curvature Measurements and Implications for the Image Formation

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概要

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• A new method is developed for the measurement of the radii of curvature R of mirror-like semiconductor wafers using the magic-mirror (Makyoh) method. A flat mirror is placed beneath the sample, thus a second, "contour" image of the sample is formed beside the sample image itself. From the size deviation of the two images that results from the curvature of the sample, R can be calculated. Experimental results obtained with mirrors with known curvature show good agreement with the calculations. Implications for the general image formation mechanism are discussed as well.

• 社団法人応用物理学会の論文
• 1996-02-15

著者

• Szentpali Beta

  Research Institute For Technical Physics Of The Hungarian Academy Of Sciences

• SZABO Janos

  Research Institute for Technical Physics of the Hungarian Academy of Sciences

• RIESZ Ferenc

  Research Institute for Technical Physics of the Hungarian Academy of Sciences

関連論文

• Makyoh Topography : Curvature Measurements and Implications for the Image Formation
• Comments on "Misorientation in GaAs on Si Grown by Migration-Enhanced Epitaxy"

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