Measurements of the Time-Averaged Sheath Drop Using the Gridded Energy Analyzer

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概要

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• The time-averaged sheath drops across the sheath in front of a powered electrode have been determined using the gridded energy analyzer, by estimating the maximum energy of the ions accelerated by the sheath potential. It is observed that from pressure p=0.01 to 1 Torr, the sheath drops decrease slightly with operating pressure, and above p=0.1 Torr, the sheath drops exhibit a sharper decrease. Also, the sheath drops increase sharply with R.F. power input. These results could be explained qualitatively in terms of the variation of R.F. voltage amplitude with pressure and R.F. power.

• 社団法人応用物理学会の論文
• 1996-02-01

著者

• Sugawara Minoru

  Hachinohe Institute Of Technology

• SANDO Kazumasa

  Faculty of Engineering, Gunma University

• Sando Kazumasa

  Faculty Of Engineering Gunma University

関連論文

• Measurements of the Time-Averaged Sheath Drop Using the Gridded Energy Analyzer
• Measurement of the Expansion Velocity of the Electrode Sheaths in RF Glow Discharge and Its Physical Mechanism

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