Measurement of the Expansion Velocity of the Electrode Sheaths in RF Glow Discharge and Its Physical Mechanism

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概要

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• The time-resolved optical technique has been applied to RF glow discharge to measure the expansion velocity of the sheath of the RF glow in conjunction with the applied RF voltage. In the technique, the movement of the edge of the negative glow is assumed to indicate the expansion of the electrode sheath thickness. We have proposed a model of the sheath expansion which takes into account acceleration, by RF voltage, of electrons initially in the region from the sheath edge to the floating potential surface relative to the plasma. The values deduced using the model compare well with the experimental results.

• 社団法人応用物理学会の論文
• 1997-05-15

著者

• Sugawara Minoru

  Hachinohe Institute Of Technology

• SANDO Kazumasa

  Faculty of Engineering, Gunma University

• Sando K

  Faculty Of Engineering Gunma University

• Sando Kazumasa

  Faculty Of Engineering Gunma University

関連論文

• Measurements of the Time-Averaged Sheath Drop Using the Gridded Energy Analyzer
• Measurement of the Expansion Velocity of the Electrode Sheaths in RF Glow Discharge and Its Physical Mechanism

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