Selective Growth of GaAs/Si by One-Step Low-Pressure Metalorganie Chemical Vapor Deposition
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1991-11-15
著者
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Sato K
Semiconductor Research Laboratory Clarion Co. Ltd.
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SATO Kiyotaka
Semiconductor Research Laboratory, Clarion Co., Ltd.
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TOGURA Kenji
Semiconductor Research Laboratory, Clarion Co., Ltd.
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Togura Kenji
Semiconductor Research Laboratory Clarion Co. Lid.
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Togura Kenji
Semiconductor Research Laboratory Clarion Co. Ltd.
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Sato Kiyotaka
Semiconductor Research Laboratory Clarion Co. Lid.
関連論文
- Selective Growth of GaAs/Si by One-Step Low-Pressure Metalorganie Chemical Vapor Deposition
- One-Step Growth of GaAs Layers on Si Substrates by Low-Pressure MOCVD